Verity Instruments spectrograph features improved line-shape uniformity

May 13, 2011 — Verity Instruments released the SD1024FL General Purpose Spectrograph, replacing the SD1024DL. The RoHS-compliant SD1024FL offers several improvements including better line shape uniformity, improved resolution, improved noise equivalent power and the addition of 2nd order blocking. 

The SD1024FL is used with Verity’s SpectraView application software. Tool integration is possible using RS232, Ethernet, and Digital I/0.

Verity Instruments Inc. provides advanced instrumentation and software for optical endpoint determination as required in etch, CVD etch back, photoresist strip, CMP endpoint and related applications.

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