Omron shares MEMS dev at Sensors Expo

June 2, 2011 – Marketwire — Omron’s Micro Device Division (MDD) will release numerous micro electromechanical system (MEMS) products in the coming year, notably an absolute pressure sensor and a thermal IR sensing array.

Expanding on Omron’s piezo resistive pressure sensor technology, the company is nearing completion on a MEMS absolute pressure sensor. It is sealed on one side from atmospheric pressure and detects elevation changes at a >1 vertical meter resolution. This level of accuracy allows a person to be tracked to a particular floor of a building. Target applications include GPS navigation, portable navigation devices, weather forecasting, and vertical velocity indication. Its operating pressure is 50 to 110 kPa.

The new MEMS thermal IR sensor targets building automation and energy conservation. When positioned to scan, it can detect occupancy in a room (without movement) and measure where additional heating or cooling is required. The product comprises 8 MEMS thermal IR sensors aligned in a 1×8 array and a 4×4 array is in development. The 4×4 array would meet home appliance needs, for example, for electric stovetops.

Omron is adding new flow sensors to both sides of its current product lines: a 70 mL/min high impedance (differential pressure type flow sensor) version, and a 70-200 LPM sensor model for high flow applications.

Omron manufactures MEMS on 200mm silicon wafers, enabling costs and productivity savings by following semiconductor-method manufacturing.

Omron will demo the thermal IR sensor at Sensors Expo, June 7-8 in Rosemont, IL, at booth 307, along with existing MEMS product line expansions.

Omron Electronic Components manufactures advanced electronic components: relays, switches, connectors, MEMS flow sensors, pressure sensors, and optical components. Omron Electronic Components is the Americas subsidiary of Omron Corporation. Learn more at www.omron.com

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