CNSE adds mask aligner for MEMS fab

July 28, 2011 — ClassOne Equipment sold its 150th mask aligner, which will be installed in the Smart System Technology & Commercialization Center (STC), part of the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.
CNSE will use the mask aligner on its expanding 200mm processing line, performing front-to-back alignment on 200mm and 150mm wafers. The Center cited price, quality and lead time as factors in their selection of a SUSS Microtec MA200 from ClassOne Equipment.
The SUSS system accurately patterns both sides of a single wafer with a high level of automation, noted Paul Tolley, Vice President for Disruptive Technologies at CNSE and Executive Director of CNSE’s STC. The tool will support a variety of critical applications, including radio frequency micro electro mechanical system (RF-MEMS) component, bio and chemical sensor, and microfluidic device manufacture.
ClassOne sells mask aligners from SUSS, EVG, OAI, ABM and HTG, and other high-quality refurbished equipment for the semiconductor manufacturing, MEMS and emerging technologies markets. For more information, please visit

The University of Albany’s College of Nanoscale Science and Engineering (CNSE) is dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. For information, visit

The College of Nanoscale Science and Engineering’s Smart System Technology & Commercialization Center assists small and large companies in transitioning new technologies from concept to manufacturing. STC maintains a 140,000-square-foot facility with over 25,000 square feet of cleanrooms for MEMS fabrication and packaging. For more information, visit

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