Novellus uncrates conformal films for sub-2Xnm

July 12, 2011 — Novellus Systems (NASDAQ:NVLS) launched the VECTOR CFD family of films for its VECTOR Express, VECTOR Extreme, and VECTOR Excel plasma-enhanced chemical vapor deposition (PECVD) systems.

The Conformal Film Deposition (CFD) suite of dielectric films consists of oxide, doped oxide and nitride films that are deposited at 50-450


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