Compact workcell kits 600 wafers in cleanroom conditions

August 17, 2011 – Marketwire — CHAD Industries launched the WaferMate300-2SS sorter/stocker workcell with multiple customer installations. The wafer buffer and kitting module manages wafer transitions in batch fab environments.

Also read: CHAD adapts wafer handlers to LED sapphire wafer sizes

The CHAD WaferMate300-2SS workcell incorporates CHAD’s new compact Wafer Buffer Module to provide dense storage of up to 150 wafers per clean Class-1 module. The Wafer Buffer Module incorporates clean air fan filters and ionizer features to store wafers that are very sensitive to damage from electrostatic discharge (ESD). Each basic workcell holds 4 modules (600 wafers).

The WaferMate300-2SS can sort or stock wafers. The compact workcell is connected to the factory system host via SECS/GEM. When sorting, the workcell receives lot data from either the factory host or the operator, retrieves wafers from the Wafer Buffer Modules, then kits them into output cassettes for the next wafer fab step. In stocker mode, the workcell receives production cassettes from upstream wafer processing, identifies each wafer, and stores them in secure, clean Wafer Buffer Modules.

The workcell incorporates an optical character reader to identify wafer ID scribes. Edge grip wafer handling and integrated wafer flipping capabilities allow the robot to invert and identify wafers that may have been incorrectly placed in the input cassette.

CHAD Industries designs, manufactures and markets odd-form electronics assembly equipment, automated solar cell manufacturing systems, and semiconductor wafer handling solutions.
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