September 7, 2011 – PRNewswire — Semiconductor and MEMS fab equipment maker SPTS Technologies received an order for an Omega deep reactive ion etch (DRIE) process module from an Asian micro electro mechanical system (MEMS) foundry. This marks SPTS’ 900th DRIE tool sold.
SPTS Omega DRIE single-wafer etch process modules provide production-level throughput and good tilt control for Bosch process silicon (Si) etching used in MEMS and through-silicon via (TSV) 3D IC manufacturing.
SPTS claims to have the largest R&D and production DRIE installed base of any company. "DRIE is the foundation of the MEMS market," said Kevin Crofton, executive vice president and chief operating officer at SPTS. Crofton points out that, as MEMS growth has been strong for the past 5-10 years, DRIE orders have increased. SPTS also combined the DRIE technologies of several companies (Aviza Technologies, STS, Primaxx from SPP, and Tegal’s AMMS DRIE division) to provide 900 systems.
SPTS Technologies designs, manufactures, sells, and supports etch, PVD, CVD and thermal capital equipment and process technologies for semiconductor, MEMS, advanced packaging, LEDs, high speed RF on GaAs and power management manufacturing. For more information about SPTS Technologies, please visit http://www.spts.com.