ASML’s Brion launches model-based SRAF

September 19, 2011 – BUSINESS WIRE — Brion Technologies, a division of ASML, uncrated Tachyon MB-SRAF (Model-Based Sub-Resolution Assist Features) for its Tachyon computational lithography platform. Resolution enhancement techniques (RET) such as sub-resolution assist features do not print, but aid in the proper imaging of the intended pattern at advanced nodes.

Freeform illumination is enabled by ASML

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