ASML’s Brion launches model-based SRAF

September 19, 2011 – BUSINESS WIRE — Brion Technologies, a division of ASML, uncrated Tachyon MB-SRAF (Model-Based Sub-Resolution Assist Features) for its Tachyon computational lithography platform. Resolution enhancement techniques (RET) such as sub-resolution assist features do not print, but aid in the proper imaging of the intended pattern at advanced nodes.

Freeform illumination is enabled by ASML


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.