Mattson sells photoresist strip systems for 3Xnm nodes

September 7, 2011 – Marketwire — Wafer fab equipment maker Mattson Technology Inc. (NASDAQ:MTSN) received multiple follow-on orders for its SUPREMA photoresist strip systems from major customers fabs in Asia, Europe and the US for volume production of advanced logic, foundry and flash memory devices for 3Xnm and below technology nodes.

Mattson began shipping the orders in Q3 2011.

Customers will use the tools for bulk, low-dose implant strip (LDIS), high-dose implant strip (HDIS), high-k strip and post-etch residue removal. The SUPREMA’s viability for "both front-end-of-line and back-end-of-line applications" is key to winning follow-on orders at advanced nodes, said Rene George, vice president and general manager of Mattson Technology’s Plasma Products Group.

Mattson Technology Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. Internet:

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