Edwards dry pump optimized for solar, FPD, semiconductor fab

October 12, 2011 — Vaccuum and abatement equipment supplier Edwards Limited expanded its iXH harsh process dry pump family with the iXH500H series of 500m3/h pumps optimized for flat panel display (FPD), solar, and advanced semiconductor processes requiring high gas flows and flexible pump temperature profiles.

These pumps consume 15% less energy than conventional products and boast enhanced mean time between servicing (MTBS), with a small footprint and hydrogen pumping capabilities of the iXH450 series, Edwards reports. The iXH500H series has increased pump temperature flexibility for flat panel, solar panel, and semiconductor fab, and yields a 30% lower cost of ownership as compared to previous-generation iXH dry pumps.

Running at low pump temperatures, the iXH500H series suits processes that use high flows of corrosive gases (e.g. FPD PECVD, thin film solar PECVD, semiconductor MOCVD), or for processes that use thermally sensitive pre-cursors (e.g. atomic layer deposition) that could


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