Imec, ASML extend litho work, debut EUV sensors

October 10, 2011 – Imec and tool vendor ASML have signed a new 5-year deal to continue collaboration on lithography technologies, both immersion and EUV, through 2015. In November Imec is slated to install ASML’s NXT 1950i 193nm immersion litho tool, and eventually will upgrade its current ASML NXE:3100 preproduction tool to a "production-ready" NXE:3300B system. (Imec, along with Albany CNSE, were the first two public recipients of ASML’s alpha EUV tools). The deal also includes ASML’s computational lithography tools and the company’s Yieldstar S200 metrology platform.

ASML preproduction scanner NXE:3100 for extreme UV lithography, installed at imec

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