Circuit edit at 22nm: DCG Systems debuts OPTIFIB Viper

November 17, 2011 – Marketwire — DCG Systems Inc. introduced the OPTIFIB Viper system for circuit edit at the 22nm node. It uses a new coaxial photon-ion column to provide spot sizes 50% smaller than those of the flagship OptiFIB-IV.

OptiFIB Viper operates at lower beam energies, avoiding damage to sensitive materials and enabling easier resolution of small-geometry device features; the practical resolution at 15kV and below enables edits of sensitive materials. The endpoint capability at sub-pA beam currents is exceptional, according to the company. The working distance remains "fundamentally unchanged" and "coaxial photon imaging is equally compelling," reports the first customer for the OPTIFIB Viper.

The system also boasts better sample exchange pump-down efficiency than prior tools, and an in-chamber stage and jet movement observation camera for user reference. The circuit edit system can duplicate frequently used apertures with the Increased number of apertures.

DCG Systems is working on fault isolation at the 11nm node as well, under a set of contracts worth $17 million from the Intelligence Advanced Research Projects Activity (IARPA).

DCG Systems Inc. provides semiconductor debug and characterization solutions for the semiconductor industry. For more information please visit

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