SUSS MicroTec partners for health research

November 25, 2011 — SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor industry and related markets, announces the cooperation with Swansea University´s Centre for NanoHealth (CNH). This cooperation is linked to CNH´s recent purchase of a SUSS Mask Aligner, MA/BA8 Gen3 with SCIL option. SCIL (Substrate Conformal Imprint Lithography) is a technology for large area imprint that enables patterning at nano scale, whilst maintaining consistent uniformity over entire wafer areas.

The research of CNH is addressing challenges in healthcare such as developing next generation solutions to enable early intervention and detection of diseases followed by immediate identification of appropriate treatments. The Centre is backed by the European Regional Development Fund through the Welsh Government to address some of the biggest challenges facing the future of healthcare such as enhancing early intervention in diagnosing and treating diseases in non-hospital environments; in the home, community clinic or local doctors’ surgery. This can be achieved through the use of devices such as biosensors to detect disease-relevant biomarker for heart disease, cancer, diabetes or other chronic conditions.

The SUSS Mask Aligner will facilitate the processing of such novel technologies by applying micro/nano fabrication methods to produce biosensors, bioMEMS devices, microfluidics and photonics.

“There are enormous opportunities in the biomedical industry. BioMEMS devices are the platform through which the nanomedicine applies.” states Frank P. Averdung, President and CEO of SÜSS MicroTec AG. “We believe that with the establishment of economical production processes the emerging bioMEMS segment is about to exceed the threshold to become a fast growing market. Our innovative nano imprint solution will enable CNH to develop production processes on large area wafers which is the key to rapid transfer of prototype technologies to cost effective volume production and commercialisation.”

Dr. Matt Elwin, Centre Manager for the Centre for NanoHealth said, “The SUSS MicroTec Aligner will be an essential tool for the development of sensors and devices within the CNH, and there are already numerous projects vying for equipment time. The additional capabilities of SCIL will also open up new possibilities and we are excited about the potential of this new technique. SUSS MicroTec has made a significant contribution to the CNH project, and we are looking forward to developing its applications in the fabrication of new biosensors and medical devices.”

Contact SÜSS MicroTec AG at


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