Silex devs wafer-level MEMS fab technologies for mobile devices

January 23, 2012 – PRNewswire via COMTEX — Pure-play MEMS foundry Silex Microsystems joined "Energy-efficient Piezo-MEMS Tunable RF Front-End Antenna Systems for Mobile Devices," or EPAMO, which is a European Union funded program developing new technologies for high performance RF systems, energy-efficient mobile communication systems, highly miniaturized and integrated RF components, and cost-efficient mobile phone component technologies.

Silex will develop high-performance metal through-silicon vias (TSV) for RF applications, PZT piezoelectric thin film technologies for actuator manufacture, and advanced integrated passive devices (IPD) using through-wafer processing and advanced materials development. This program leverages Silex’ expertise in 3D through-wafer processing to develop new micro electro mechanical system (MEMS) capabilities, says Dr Thorbjorn Ebefors, chief technologist at Silex Microsystems. "These new techniques will be used to fabricate high-density integrated inductors, resistors and capacitors for new classes of devices," Ebefors added.

RF MEMS have gained a great deal of interest from mobile electronics followers recently, when a WiSpry RF MEMS component was identified in a major Samsung smartphone. WiSpry confirmed the design win.

EPAMO will develop new advanced wafer materials and RF component designs, combining new thin film materials and thin film technologies with CMOS solutions and advanced 3D packaging technologies. Silex is the only pure-play foundry involved in EPAMO.

EPAMO is coordinated by Dr. Thomas Metzger of EPCOS AG (RF filters and module solutions provider for the RF front-end of mobile phones). For more information see

ENIAC JU (European Technology Platform on Nanoelectronics Joint Undertaking), a public-private partnership between the European Commission, 21 European countries and various nanoelectronics actors funds euro 2.2 M of EPAMO budget. National public funding from the participating nations covers euro 5.5 M, and euro 5.6 M comes from EPAMO partners. For more information see

Silex Microsystems a pure-play MEMS foundry with production operations totaling 25,000 square feet and dedicated lines for both 6" and 8" wafers. For more information see


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