February 23, 2012 — AIXTRON SE sold 2 BM Pro, formerly known as Black Magic, 4"-wafer deposition tools to the Italian Institute of Technology (IIT) in Pisa, Italy, for the development and production of graphene used in novel hydrogen storage systems.
IIT Pisa will use 1 system to deposit graphene via chemical vapor deposition (CVD) and plasma enhanced chemical vapor deposition (PECVD). The second BM Pro system is configured for high-temperature (1800°C) processing, forming graphene with sublimation. We were seeking highly uniform, reproducible thin films, said Dr Camilla Coletti at IIT, as well as flexibility in deposition, spanning CVD, PECVD, and sublimation. The tools will form the basis of IIT’s research on graphene film synthesis for nanoelectronics and energy storage devices.
The local AIXTRON support team installed and commissioned each system at the Power Nanosystems Laboratory, IIT Pisa’s Center for Nanotechnology Innovation, at Laboratorio NEST of Scuola Normale Superiore ([email protected]).
[email protected] is an interdisciplinary research and development center studying fundamental phenomena on a nanoscale and exploiting nanomaterials through innovative devices.
AIXTRON provides manufacturing equipment for microelectronics companies in light-emitting diode (LED), semiconductor, and related industries. Learn more about AIXTRON at www.aixtron.com.