February 28, 2012 — The Handbook of Physical Vapor Deposition (PVD) Processing, Edition No. 2 has been released, covering all aspects of PVD process technology, from characterization and preparation of the substrate material, through deposition and film characterization, to post-deposition processing. The new edition focuses on the aspects of the process flow critical to economical film deposition within performance specifications. It includes the latest developments in PVD process technology.
The book covers substrate characterization, adhesion, cleaning, and PVD processing, as well as vacuum technology and the fundamentals of individual deposition processes. The author, Donald M. Mattox, relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, clarifying the interrelationship between various aspects of the film deposition processing and the resulting film properties.
The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment to provide useful hints for avoiding problems and solving problems that do arise.
The book can be read as an introduction for users new to the PVD field, but is formatted to allow knowledgeable readers to scan to discussions of particular interest to them.
Substrate ("Real") Surfaces and Surface Modification
The "Good" Vacuum (Low Pressure) Processing Environment
The Sub-Atmospheric Processing Environments
The Low-Pressure Plasma Processing Environment
Vacuum Evaporation and Vacuum Deposition
Physical Sputtering and Sputter Deposition (Sputtering)
Arc Vapor Deposition
Ion Plating and Ion Beam Assisted Deposition
Atomistic Film Growth and Some Growth-Related Film Properties
Film Characterization and Some Basic Film Properties
Adhesion and Deadhesion
External Processing Environment
Transfer of Technology from R&D to Manufacturing
Appendices include listings of periodicals and professional societies, terms and acronyms, and material on transferring technology between R&D and manufacturing. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1 will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.