April 26, 2012 — Semiconductor capital equipment maker OEM Group began shipping a multi-tool order to a major light-emitting diode (LED) manufacturer, including Spray Ozone Tool (SOT) and Spray Acid Tool (SAT) semi-automated batch surface preparation systems from OEM Group’s Cintillio product line.
The wet-chemical processing toolset uses Cintillio’s Enhanced Spray Technology, with up to 6 rows of nozzles. Numerous wafer lots may be processed simultaneously. The tools offer high throughput and reliable wafer-surface wetting with chemical mixtures in 25/50-wafer batch processes. They use a common platform for solvent, acid, and ozone applications. The cabinet footprint is 1.78m², with side access for maintenance.
SOT’s HydroOzone post-ash clean eliminates thousands of gallons of sulphuric acid and hydrogen peroxide, reduces deionized (DI) water consumption by 84%, reduces cycle time and defects, and increases yields, the company reports.
The Cintillio SAT and SOT tools handle both resist strip and organic cleaning post-etch, noted the LED maker, which serves display, backlighting, automotive, and general lighting markets. The systems will support the LED manufacturer’s 150mm production efforts.
The Cintillo line also includes the single- and dual-chamber Spray Solvent Tool (SST) with one, two or three chemical system configurations that accommodate most solvent-based process applications.
OEM Group is a global manufacturer of new and remanufactured semiconductor capital equipment for established markets and emerging technologies. Its LEGENDS technology portfolio is based on exclusive intellectual property acquired from leading semiconductor brands, including: Tegal thin-film etch, Sputtered Films Endeavor, AMS, MRC Eclipse, AGHeatpulse, Varian Sunset, Lam AutoEtch, and Applied Materials/Semitool surface preparation equipment and processes. Its Classics equipment line features recognized brands optimized for new applications and increased productivity. OEM Group also offers foundry services for piezoelectric AlN films, yield optimization, and process and product development and demonstration. Learn more at www.oemgroupinc.com.