Semiconductor-grade flow sensor measures photoresist, solvent supply

May 14, 2012 — SENSIRION introduced the SLQ-QT105 semiconductor-grade flow sensor for flow rates below 2cc/sec (120ml/min) of hydrocarbon-based liquids, such as photoresists and solvents.

The flow sensor targets high-purity fluid handling applications for semiconductor, flat panel display (FPD), and photovoltaics manufacturing. Flow is measured without moving parts and non-invasively through the wall of a straight flow channel.

The SLQ-QT105 sensor features a 40msec measurement response time and very high sensitivity for flow rates down to 0.05cc/sec (3ml/min). Detection of air bubbles in the microliter range is also possible.

A smart digital interface and robust RS485 communications enable remote deployment and provide bus capability.

SENSIRION supplies humidity sensors and flow sensors. Learn more at

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