450mm semiconductor metrology tool to integrate IDE active vibration isolation

June 29, 2012 — The Integrated Dynamics Engineering (IDE) Group developed the STC series of Active Vibration Isolation Systems supporting OEMs in the production of 450mm wafer equipment.

A global metrology system OEM has placed an order for the system.

IDE’s advanced STC Active Vibration Isolation system stabilizes the high-speed stage handling 450mm wafers during metrology processes. The STC system incorporates compact steel isolators in a rigid dual-level isolation platform installed between the frame and granite, and an integrated state-of-the-art IDE controller.

The easy-to-install STC vibration isolation system uses advanced stage motion compensation technology. It significantly reduces vibration levels and settling time, to enable high resolution imaging and critical measurement while increasing throughput.

IDE provides active vibration isolation, EMI cancellation, and acoustic controls to global semiconductor manufacturing and advanced microscopy companies. The IDE Group is part of the semiconductor division of Aalberts Industries. For more information on the IDE Group, visit www.ideworld.com.

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