CEA-Leti installs Soitec CVD tool for HKMG and PCM research

June 27, 2012 — Research organization CEA-Leti installed a chemical vapor deposition (CVD) tool from Altatech, a subsidiary of Soitec (Euronext), semiconductor materials developer. This is a repeat order from CEA-Leti and the first equipment order Altatech Semiconductor S.A. has fulfilled as a new subsidiary of Soitec. CEA-Leti and Altatech have collaborated on research projects involving advanced materials deposition and the integration of next-generation semiconductor devices.

The AltaCVD system will be used by CEA-Leti’s Silicon Technology Division to develop advanced phase-change memory (PCM) devices and high-k metal gates (HKMG) for the sub-20nm technology node.

The AltaCVD tool will perform low-temperature deposition of binary and ternary alloys in PCM research. With its tightly controlled stoichiometry, the system can create highly conformal thin films with thicknesses of 100nm or less, which suits HKMG deposition as well.

Capable of accommodating 200mm or 300mm wafers, the AltaCVD system is a multi-chamber tool designed for plasma-enhanced (PECVD) or metal-organic (MOCVD) deposition of advanced semiconductor materials using liquid precursors. Using direct injection of liquid precursors and a patented flash-vaporization system, this system can operate over a wide range of vaporization and deposition temperatures. These can include deposition of advanced materials for high-k gate dielectrics, metal gate electrodes, capacitors and 3D integration. In thermal CVD or RF-enhanced deposition steps, low-frequency plasma enables tuning of the thin film’s mechanical, electrical and optical properties.

 “The AltaCVD tool provides both the flexibility and the performance we need to conduct our semiconductor research projects. Furthermore, its reactor technology opens new areas of exploration for advanced materials,” said Olivier Demolliens, CEA-Leti’s equipment asset manager.

Leti (Laboratoire d’Électronique de Technologie de l’Information) is an institute of CEA, a French research and technology organization with activities in energy, IT, healthcare, defense and security. Leti is focused on creating value and innovation through technology transfer to its industrial partners. It specializes in micro- and nanotechnologies and their applications, from wireless devices and systems, to biology, healthcare and photonics, as well as in Micro-Nano Systems (MNS). For more information, visit www.leti.fr.

Soitec makes semiconductor materials. For more information, visit: www.soitec.com

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