Edwards optimizes dry vacuum pumps for FPD fab

June 26, 2012 — Vacuum product and abatement system maker Edwards (NASDAQ:EVAC) debuted the iXL250Q and iXL750Q dry pumps, joining the iXL500Q pump in flat panel display (FPD) and solar manufacturing applications. The pumps are used for the smaller loadlocks at Generation 4 (Gen-4) through the largest at Gen-8 and Gen-10 fabs.

Also read: Edwards tailors vacuum pump for LED, compound semiconductor manufacturing

The iXL250Q is targeted for smaller chambers used for earlier generation FPDs (e.g. Generation 4), while the iXL500Q and iXL750Q are more suited to larger chamber volumes encountered in Generation 8 and 10.

These pumps are designed to maximize substrate throughput, while minimizing power, footprint and weight. In addition, no maintenance is required between overhauls.

All pumps are “Green Mode” enabled, allowing them to run at lower power during idle periods.

Time to pump down a particular volume chamber is largely determined by how much pumping speed is available close to atmospheric pressure. As the product names suggest, the iXL250Q, iXL500Q and iXL750Q provide approximately 250 m3/h, 500 m3/h, and 750 m3/h pumping speed around atmospheric pressure.

Visit Edwards at North Hall, Booth 5351 during InterSolar and SEMICON West, taking place July 10-12 at the Moscone Center in San Francisco. More SEMICON West products here.

Edwards is a leading manufacturer of sophisticated vacuum products and abatement systems and a leading provider of related value-added services for the manufacture of semiconductors, flat panel displays, LEDs and solar cells, as well as other industries. Edwards’ American Depositary Shares trade on The NASDAQ Global Select Market under the symbol EVAC. Further information about Edwards can be found at www.edwardsvacuum.com.

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