JPSA picosecond laser micromachining platform reduces debris and thermal damage

June 26, 2012 — JP Sercel Associates Inc. released the IX-6168-PS picosecond-laser-based micromachining platform, using lasers with 5-500 picosecond pulse lengths.

The lasers machine glass, ceramics, metals and alloys, and other hard-to-process materials. With ultrafast laser processing, the pulse duration is shorter than the thermal diffusion timescale of the material, resulting in a direct solid to vapor transition that greatly reduces debris formation, and minimizes thermal impact on the surrounding area.

The JPSA picosecond laser platform is designed to accept multiple types of ultrafast lasers. Laser choices include infrared (IR), green or UV wavelengths, and a range of power and pulse rate options. The laser is accommodated in a slide-out service trolley within the workstation, and is fully integrated with the system control software. 

JPSA provides a dual-beam delivery configuration; a fixed-beam configuration can be used to produce a finely focused beam, with a precision air-bearing stage for precise feature positioning; for high-speed processing of complex shapes, a high-accuracy galvanometer configuration incorporates a step-and-scan function. The IX-6168-PS is delivered with both fixed beam and galvanometer scanning capability, and can be easily reconfigured on-site to suit individual needs.

The IX-6168-PS can be supplied as a manual-load system, or combined with JPSA’s Integrated Automation Platform for fully automated operation in semiconductor wafer applications. Configuration options include laser wavelength, power and repetition rate, and a choice of galvanometer scanner and lens systems to optimize large deflection field applications.

JPSA products and services include UV excimer, DPSS and ultra-fast laser micromachining systems, UV and VUV laser beam delivery systems, laser materials processing development, optical damage testing, and excimer laser refurbishment services. JPSA operates a high-performance laser job shop as well as a systems engineering and manufacturing business. For more information, visit


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