Metrology merger: MicroSense acquires SigmaTech

June 13, 2012 — MicroSense LLC, maker of high-resolution capacitive position sensors, metrology modules, and high-sensitivity magnetic metrology tools, acquired SigmaTech Inc., developer of high-sensitivity metrology tools for light-emitting diode (LED), micro electro mechanical system (MEMS), and semiconductor manufacturing.

“SigmaTech’s customers and prospects will continue to be supported by the existing SigmaTech employees, all of whom will stay with the combined business,” said James Pelusi, Chairman and CEO of MicroSense.

MicroSense gains leading-edge wafer inspection tools for its metrology portfolio, with systems that integrate optical spectrometry, interferometry, SigmaTech’s patented auto-positioning back pressure (APBP) technology and other sensing tools. MicroSense will integrate its capacitance sensors into SigmaTech metrology platforms. SigmaTech took the 2011 Best of West award at SEMICON West. The MicroSense high-resolution capacitive sensor technology provides “an ideal path to increasing throughput” of SigmaTech metrology systems and expanding its applications, said Jacques Fauque, semiconductor industry veteran and founder of SigmaTech who will remain with the business and continue to lead its development.

MicroSense’s capacitive sensors enable precise, high-bandwidth measurements of solar wafers, hard disk drive (HDD) motors, air bearing spindles, precision X-Y stages, optical disks, automotive parts and machine tools. Leading equipment manufacturers around the world use MicroSense capacitive sensors in wafer lithography systems, solar wafer sorters, autofocus mechanisms, nanopositioning stages, metrology tools and flat panel display manufacturing equipment.

MicroSense supplies capacitive sensors, metrology modules, and magnetic metrology tools. Learn more at

SigmaTech offers automated metrology solutions for a broad range of standard and specific applications in the field of semiconductor wafers, materials and optics. SigmaTech has multiple system installations at many of the world’s leading semiconductor manufacturing companies and stands at the forefront of the dimensional wafer metrology industry. SigmaTech currently offers multiple gauging technologies that can be implemented to provide the optimal solution for virtually any customer application. Learn more at


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