Veeco adds high-performance, compact MOCVD tools to TurboDisco line-up

June 7, 2012 – BUSINESS WIRE — Veeco Instruments Inc. (Nasdaq: VECO) added 3 new models of its TurboDisc metal organic chemical vapor deposition (MOCVD) systems for high brightness light emitting diode (HB-LED) production: TurboDisc MaxBright M and MHP, and TurboDisc K465i HP.

MaxBright M is a modular and more compact version of the multi-reactor system, with up to 15% smaller footprint. Its layout configuration flexibility accommodates various fab spacing requirements.

MaxBright MHP (pictured above) is a high-performance version of the MaxBright M, with as much as 20% within-wafer wavelength uniformity improvement. The system incorporates new thermal and flow technologies to improve LED yields, and Veeco reports that it offers lower cost of ownership than MaxBright.

K465i HP is a high-performance option for Veeco’s single-reactor MOCVD system which delivers up to 20% within-wafer wavelength uniformity improvement compared to the K465i and lower cost of ownership. It is available as a field upgrade for existing systems.

All 3 of the new MOCVD tools are available in 2”, 4”, 6”, and 8” wafer configurations.

Veeco makes MOCVD, MBE, ion beam, and related equipment for the manufacture of LEDs, power electronics, hard drives, MEMS and wireless chips. For information, visit

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