July 30, 2012 — Pfeiffer Vacuum, vacuum product and services supplier, introduced the Sputter Process Monitor SPM 220 and High Pressure Analyzer HPA 220 gas analysis systems to monitor and document vacuum processes.
Pfeiffer Vacuum based the systems on the PrismaPlus mass spectrometer combined with a dry compressing HiPace turbo pumping station. They are available in mass ranges from 1-100 and 1-200 amu; the HPA 200 is also available from 1-300 amu.
The Sputter Process Monitor SPM 220’s specially developed ion source enables a direct connection between the analyzer and the process chamber. The tool monitors the vacuum conditions of sputter processes and similar applications without time delays that hamper inlet systems, at a pressure up to 10-2 mbar. An additional orifice system allows the pressure range to be expanded up to 10 mbar.
The High Pressure Analyzer HPA 220 is available, depending on the application conditions, with three different gas inlet valves, both manually and electro-pneumatically operated. Its compact, modular design suits gas analysis in the pressure range from high vacuum to 50 mbar.
The SPM 220 and HPA 220 offer numerous digital and analog inlets and outlets for connection to process control systems. The newly developed operating software boasts a clear user interface and simple documentation of measurement results. The software can be modified for special process requirements.
Pfeiffer Vacuum North American operations offer marketing, sales, field services, repair, customer training, and applications and support. Pfeiffer Vacuum (Stock Exchange Symbol PFV, ISIN DE0006916604) is one of the world’s leading providers of vacuum solutions. In addition to a full range of hybrid and magnetically levitated turbopumps, the product portfolio comprises backing pumps, measurement and analysis devices, components as well as vacuum chambers and systems. For further information, visit www.pfeiffer-vacuum.com.