Bruker improves AFMs for semiconductor metrology with KPFM mode

August 14, 2012 – BUSINESS WIRE — Bruker released the PeakForce Kelvin Probe Force Microscopy (KPFM) mode for its atomic force microscopes (AFMs). PeakForce KPFM improves quantitative surface potential data for semiconductor metrology and materials research.

The PeakForce KPFM accessory, an optional addition available for the Dimension Icon and MultiMode 8 AFMs, includes the complete set of KPFM detection mechanisms (amplitude and frequency modulation), in conjunction with TappingMode and Peak Force Tapping, as well as the ability to perform KPFM measurements over an extended voltage range.

The mode uses frequency-modulation detection to provide the highest spatial resolution Kelvin probe data. It builds on Bruker’s PeakForce Tapping technology to provide directly correlated quantitative nanomechanical data, which improves the sensitivity of the frequency-modulation measurement and eliminates artifacts. PeakForce KPFM mode combines FM-KPFM detection with PeakForce Tapping technology. PeakForce KPFM provides a completely automated parameter setup with ScanAsyst.

“Our research and industrial customers have increasing needs for quantitative nanoscale property measurements,” said Mark R. Munch, Ph.D., president of Bruker Nano Surfaces Division. “We are committed to move AFM beyond just imaging contrast to quantitative electrical and mechanical property maps,” added David V. Rossi, EVP and GM, Bruker’s AFM Business Unit.

Bruker Corporation (NASDAQ: BRKR) provides high-performance scientific instruments and solutions for molecular and materials research, as well as for industrial and applied analysis. For more information about Bruker Corporation, please visit

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