August 17, 2012 — Jilin University China has installed an AIXTRON CCS MOCVD 3 x 2” wafer configuration system for gallium nitride (GaN) ultraviolet (UV) and white light-emitting diode (LED) research.
Jilin University China is an existing customer for AIXTRON. Dr. Zhang of the Jilin University, State Key Laboratory on Integrated Optoelectronics, commented that the researchers were “particularly impressed with the reactor’s ergonomics and security.” One of AIXTRON’s local support teams has installed and commissioned the new reactor in a state-of-the-art clean-room facility at Jilin University in Changchun, China.
“Our intention is to develop exciting new material structures that will lead to greater understanding and to production of gallium nitride materials for UV and white LEDs. This is a challenging task, but we are confident that the combination of the process technology capabilities of the CCS reactor and strong backing from the local AIXTRON support team will enable us to achieve our aims quickly and efficiently,” added Zhang.
Using the Close Coupled Showerhead (CCS) technology, reagents are introduced into the reactor through a water-cooled showerhead surface over the entire area of deposition. The showerhead is close to the substrates and is constructed to enable precursors to be separated right up to the point where they are injected onto the substrates through a multiplicity of small tubes. The reagents are injected into the reactor chamber through separate orifices in a water-cooled showerhead injector, to create a very uniform distribution of reagent gases.
Substrates are placed on top of a rotating susceptor, which is resistively heated. The three-zone heater enables modification of the temperature profile to provide temperature uniformity over the susceptor diameter.
Jilin University is a leading national university under the direct jurisdiction of China’s Ministry of Education, located in Changchun, the capital city of Jilin Province in Northeast China. The University boasts sixteen disciplinary areas, six state key laboratories, and eight national bases for the development of basic science. Other resources include seven key laboratories sponsored by the Ministry of Education and eleven by other ministries of the Chinese government.
AIXTRON provides MOCVD production technologies for semiconductor devices, such as LEDs, lasers, transistors and solar cells. For further information on AIXTRON (FSE: AIXA, ISIN DE000A0WMPJ6, DE000A1MMEF7; NASDAQ: AIXG, ISIN US0096061041), see www.aixtron.com.