Rubicon orders Zeta 300 optical profilers for sapphire LED substrates

August 6, 2012 — Zeta Instruments Inc. will install multiple optical profilers for micron-scale surface analysis at sapphire substrate maker Rubicon Technology Inc. (Nasdaq:RBCN). Rubicon is using the Zeta 300 series optical profilers for metrology and inspection on its sapphire substrates and wafer production aimed at the high-brightness light-emitting diodes (HB-LED) market.

Zeta’s 300 series high-precision metrology systems are designed to address the stringent specifications of the patterned sapphire substrate (PSS) market, enabling higher yields and lower wafer scrap at LED makers. One system performs detailed measurement of PSS structure dimensions and wafer defect inspection. It offered the best combination of speed and accuracy for Rubicon’s production-environment metrology needs, said Raja M. Parvez, president and CEO of Rubicon Technology.

Also read: Technology and cost considerations for high-volume HBLED lithography

The Zeta-300 series leverages Zeta’s Z-Dot technology to deliver high repeatability and accuracy for the measurement of LED-patterned/etched substrates, photo-resist and stacked structures on transparent surfaces. Coupled with application-specific software and a companion automated wafer handler, the Zeta-380 provides imaging and measurement capabilities superior to those of laser confocal microscopes.  The Zeta-380 measures and detects defects falling outside the industry certification levels that may not be detected by competing offerings.

Rubicon Technology, Inc. is an advanced electronic materials provider that is engaged in developing, manufacturing and selling monocrystalline sapphire and other crystalline products for light-emitting diodes (LEDs), radio frequency integrated circuits (RFICs), blue laser diodes, optoelectronics and other optical applications.

Zeta Instruments provides optical profiler systems that enable manufacturers of microfluidics/biotechnology, high-brightness LEDs, solar cells, and magnetic storage media to improve yields and process control. To learn more about Zeta Instruments, please visit

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