MV Products has announced that their high-capacity, modular vacuum pump inlet-exhaust traps can be stacked for semiconductor wafer fabrication processes which produce a lot of heavy particulates.
The MV Multi-Trap 12" Vacuum Inlet Trap is an inlet-exhaust trap that can be stacked for 300mm semiconductor wafer fabricators utilizing LPCVD, PECVD, and ALD processing. Featuring all stainless steel construction with a first stage knock-down baffle, two stacked traps can accumulate up to 2,500 cu. in. of solids, depending upon the process.
Increasing the number of wafer processing runs between maintenance intervals, two stacked MV Multi-Trap 12" Vacuum Inlet Traps provide six stages of user-selectable filter elements. Filter elements include stainless steel and copper gauze, molecular sieve, activated alumina or charcoal, micro-rated pleated polypropylene, and Sodasorb.
Mass-Vac, Inc. specializes in solving the process contamination problems associated vacuum systems that are used with processes such as MOCVD, HVPE, PECVD, or LPCVD which generate high volumes of particulates. These processes are used in manufacturing green products such as solar cells, HB-LEDs, and Li-Ion batteries. Mass-Vac, Inc. is an active member of SEMI and the American Vacuum Society.