cyberTECHNOLOGIES GmbH announced the addition of White-Light Interferometry (WLI) to its suite of production-proven CT SERIES non-contact surface metrology systems at SEMICON West 2013. WLI significantly broadens the range of use cases and applications of the existing CT SERIES, CT 100, CT 300 and CT x50T product lines and allows the user to not only scan large areas or samples, but also to zoom in on very small areas of interest for sub-nm analysis.

The new WLI modules can be installed either by itself or concurrently with the existing point sensors and provides the user with the ability to measure a broad range of applications, from surface topographies and printed structures on the order of several hundred micrometers down to sub-nanometer resolution surface roughness measurements, in a single system.

“Our customers want to take advantage of our superior user interface and automation capabilities not just in scanning applications but also for use cases where sub-nanometer resolution is required, “ said Frank Kemnitzer, head of product management at cyberTECHNOLOGIES GmbH. “With the WLI module installed, they can now select between different measurement technologies and adapt the measurement system to their requirement at hand. All within the same easy to use interface, the same advanced analysis capabilities, without learning how to use another system.” The systems were designed with modularity and versatility in mind and the addition of the new WLI sensors further broadens their range of applications.

Be it for quick, individual measurements on a single or multiple samples or the automatic inspection of complete production runs, cyberTECHNOLOGIES’ SCAN SUITE makes it simple and easy for the user to get accurate results.

Multiple systems with WLI  have been installed at leading manufacturers in Europe, Asia and North America.