Compact point of use fluid delivery heater replaces multiple components in a system

Watlow, a designer and manufacturer of complete thermal systems, announces its new point-of-use fluid delivery heater, a compact solution used to provide precise and uniform heat to gases flowing into the chamber.

This new heating solution is designed as an integrated solution that replaces multiple components in a system. Space in the tool is prime real estate and design engineers are seeking solutions that are not only compact but better performing. Watlow’s new fluid delivery heater features Watlow’s patented thermal spray technology. The heater makes use of its entire surface to optimize heat transfer and temperature uniformity at temperatures up to 450°C. This design enables a high performance heater to also be small and lightweight, helping to reduce overall system size, complexity and costs.

The heater’s patented circuit patterning process offers many benefits including customizable heating profiles, distributed wattage and/or multiple zones of control and precise and repeatable power distribution.

The point-of-use fluid delivery heater is a high watt density, low mass heater, which contributes to fast response times, efficient heat transfer and enables on-demand process start up.

“At Watlow, we are striving to bring innovation to the industry to meet the needs of advanced process tools,” said Ray Derler, semiconductor business unit marketing director. “We listen to our customers. We understand the issues they face and we design and manufacture solutions to not only meet their needs, but delight them as well. This new fluid delivery heater is a perfect example. We have engineered a solution that can mounted close to the chamber, where space is tight, to deliver process gases with high temperature accuracy.”


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