Stanford researchers advance area selective ALD to develop more energy efficient electronics

Stanford University researchers sponsored by Semiconductor Research Corporation (SRC) have developed a new area selective atomic layer deposition (ALD) process that promises to accelerate the manufacturing of higher performing, more energy efficient semiconductors.

It is well known that next-generation electronic, optoelectronic and sensing devices that contain nanoscale dimensions face increasingly difficult materials and fabrication challenges as the downward scaling of these devices continues. Conventional semiconductor manufacturing processes are time-consuming and expensive, in part due to the need for lithographic patterning. The Stanford research leverages simple ALD and etching processes that eliminate this lithography step and improve selective deposition of dielectric materials by more than 10 times in film thickness compared to similar advanced processes.

Due to difficulties of current top-down fabrication processes that contain multiple deposition, lithography and etching steps, along with problems with misalignment in lithography, using an alternative approach in which the desired materials are directly and selectively deposited would significantly facilitate the process, according to the Stanford team.

“Our technology is a promising candidate for overcoming the challenges of top-down processing and misalignment because it greatly improves the ability to perform selective deposition of materials. This research introduces a novel processing method to meet the increasingly difficult materials challenges associated with new devices,” said Dr. Stacey Bent, Department of Chemical Engineering Chair and Jagdeep and Roshni Singh Professor in School of Engineering, Stanford University.

Current approaches utilize lithography for nanoscale patterning. Using lithography and etching for fabrication of 2D or 3D structures often results in misaligned features and causes a risk of shorting or high resistant areas. However, selective deposition using ALD can reduce these risks and reduce the process time and steps.

Bent explained that selective deposition allows layers of material to be added onto a substrate only where desired without the need for additional lithography steps. However, the high level of selectivity needed for a manufacture-worthy process has not yet been achieved in area selective deposition studies. In addition, most methods for area selective deposition require long processing times.

The Stanford research has been focused on selective deposition of dielectric materials on metal/dielectric patterns. These type of structures can be found in interconnects and back-end-of-line (BEOL) processing. With ALD being used in other stages of the device fabrication process as well, the results from the Stanford experiments can potentially be applied to a variety of nanoscale electronic, optoelectronic and sensing devices.

The research developments occurred during the second year of research on the topic, and the Stanford team is continuing to explore new methods for area selective ALD to improve both selectivity and manufacturability.

“The Stanford team’s research has shown for the first time that, by following selective deposition of a dielectric material using pre-treatment by an inhibitory material, they can significantly reduce the process time (from 48 hours to less than 1 hour) and also improve the limits of selective deposition of dielectrics by more than 10 times,” said Kwok Ng, Senior Science Director of Nanomanufacturing Materials and Processes at SRC.


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