CyberOptics Corporation, a global developer and manufacturer of high precision 3D sensing technology solutions, will showcase WaferSense and ReticleSense Auto Multi Sensors (AMS) at SEMICON China, March 15-17, 2015 in the PSC and KNG booth #3358 and the Winifred booth #1461.

The WaferSense and ReticleSense Auto Multi Sensor (AMS/AMSR) line measures relative humidity (RH) in real time. Process and equipment engineers can also measure vibration and leveling using this measurement device. With its thin and light form factor, CyberOptics’ AMS can travel through virtually any tool and the AMSR can be used in any reticle environment.

“The Auto Multi Sensor devices are yet another way to increase yield and reduce dreaded downtime in semiconductor environments, saving our customers both time and money,” said Dr. Subodh Kulkarni, President  and CEO, CyberOptics.

CyberOptics will also feature the new Airborne Particle Sensor (APS2) devices that improve equipment set-up and long-term yields in semiconductor fabs by wireless monitoring airborne particles in real-time.

The new APS2 quickly monitors, identifies and enables troubleshooting of airborne particles down to .14um within semiconductor process equipment and automated material handling systems. It easily identifies when and where the particles originate and speeds equipment qualification with wireless measurements, shortens equipment maintenance cycles with wafer-like and reticle form factors and lowers equipment expenses by providing objective and reproducible data.