DSA: Progress Toward Manufacturing Readiness



November 15, 2016 at 1:00 p.m. ET

Free to attend

Length: Approximately one hour

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Directed self-assembly (DSA) patterning is one of the primary methods being pursued for future advanced patterning nodes. Since DSA’s initial introduction in the early 2000s, great progress has been made. However, many challenges remain for achieving manufacturing readiness. Key improvements in the areas of materials, defectivity, and process integration are still needed. This webcast will cover published progress to date, review key improvements needed, and discuss new advances in DSA technology. Results from CEA-LETI’s 300-mm lab-to-fab for validation of DSA’s manufacturing readiness will be discussed.


James LambJames Lamb is a 33-year veteran of the semiconductor and electronics industry in both technology development and commercialization. He currently serves as Corporate Technical Fellow at Brewer Science. Previously, he served as Director of the Carbon Electronics Center and Printed Electronics Center from 2010-2014. From 2008-2010, Jim served as Managing Director of Product Management, and from 2001 through 2008, he served as Director of Corporate Business Development and the New Business Group. Earlier responsibilities at Brewer Science include Product Reliability Manager, Customer Technical Service Manager, and ARC® materials Quality Control Manager. Before joining Brewer Science in 1984, he worked as a Process Engineer at IBM East Fishkill. He graduated from the University of Missouri-Rolla in 1982 with a B.S. in Chemical Engineering. During his career, he has contributed as an inventor on 19 patents and as a coauthor of 28 technical publications. 

Raluca_Tiron_LetiRaluca Tiron joined Leti’s lithography group in 2004, working on e-beam lithography. In 2005, she integrates Leti’s Resist Expertise Center, where she worked on advanced lithography process development, resist characterization and mechanisms comprehension in 193 nm lithography. Starting in 2008, her research interest focused on directed self-assembly (DSA) of block copolymers, and she currently leads this activity at Leti. Dr. Tiron has been Leti project leader in several projects, including the national project MAGNIPHICO and the European project PLACYD. She is currently also in charge of an industrial collaboration around the DSA. She has authored and coauthored more than 60 papers in international reviews and holds more than 15 patents. Dr. Tiron received her PhD degree in molecular magnetism from Joseph Fourier University France in 2004.


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