Thin-film Processing Based Manufacturing Technology for Phase Change Memory (PcRAM)

presented by Dr. Koukou Suu, General Manager, ULVAC

Smart ICT (Information and Communication Technology) such as “Big Data”, “Cloud computing” and Smart Functionalities such as Stand-alone Self-activating MEMS/Sensors construct Smart Systems which enable IoT, IoE (Internet of Everything) thus Smart Society. To realize above-mentioned Smart Technologies, high-density, low- power consumption, wide-bandwidth, fast-operation semiconductor devices, as well as smart functional devices enabled by integrating functionalities with advanced semiconductor technologies including CMOS technologies are necessary. Thin-film functional material such as phase-change (Ge2Sb2Te5) and selector materials have been utilized to form advanced semiconductor devices including Phase-Change Random Access Memory (PcRAM) for Smart ICT solutions. In this session, we will show our development activities of phase-change material thin- film processing technologies including sputtering, MOCVD and plasma etching as well as manufacturing processes for Phase-Change Random Access Memory (PcRAM).