Boston Semi Equipment enhances MEMS sensor testing

Boston Semi Equipment (BSE), a global semiconductor test handler manufacturer and provider of test automation technical services, introduced today its Zeus gravity feed solution for handling pressure MEMS devices that require pressure and vacuum stimulus during testing. The system is an enhanced capability for BSE’s existing pressure MEMS handling solution and enables MEMS test cells to apply pressure and vacuum in a single test cycle.

“Our innovative design for applying a pressure stimulus to devices under test enabled us to easily integrate a vacuum stimulus,” said Kevin Brennan, vice president of marketing for BSE. “This solution is unique in the industry. Our customers can already test MEMS devices faster using the Zeus handler, and now they can test with both vacuum and pressure stimuli in a single pass through the handler. This capability is a significant boost to productivity, making Zeus-based MEMS test cells a highly cost-effective solution for pressure MEMS testing.”

The Zeus is a tri-temperature handler that can be configured with up to eight test sites. Cold temperature testing is achieved using LN2 or a BSE-designed, two-stage chiller, the MR2. The Zeus offers the features and performance needed by today’s test cells at a more affordable price point.


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