October 11, 2001 – Chelmsford, MA – Brooks Automation Inc., supplier of tool and factory hardware and software automation solutions for the semiconductor industry, completed the acquisition of Tec-Sem AG (Tec-Sem), a manufacturer of bare reticle stockers, tool buffers and batch transfer systems for the semiconductor industry.

The transaction will be accounted for as a purchase of assets in exchange for a combination of cash and Brooks’ Common Stock totaling approximately $20 million.

“The Tec-Sem acquisition is an important part of Brooks Automation’s strategy for the factory interface market segment,” said Robert Therrien, president and CEO of Brooks. “The cost of leading-edge photomask sets can now exceed $500,000, and this is causing semiconductor manufacturers to rely increasingly on Tec-Sem’s bare reticle stocker technology. In addition, Tec-Sem’s test wafer stocker permits 300mm factories to store several thousand wafers in an area no larger than a process tool, saving valuable footprint.”