Dec. 13, 2002 – Andover, MA – MKS Instruments Inc., a provider of products that measure, control, power, and monitor critical parameters of semiconductor and other advanced thin-film manufacturing process environments, has announced organizational changes to further integrate acquired companies, accelerate subsystem development, and increase flexibility and customer responsiveness.

The pressure measurement and control product group, the materials delivery product group, the control and information technology group, and the advanced process control group now form the new instruments and control sSystems product group, with John Smith as VP and GM, reporting to John Bertucci, chairman, CEO, and president of MKS.

Two other major product groups, power and reactive gas, and vacuum products, continue to report directly to Bertucci.

“This organizational structure enables us to transfer technologies, process control knowledge and customer feedback across product lines,” said Bertucci.

The instruments and control systems product group includes pressure and flow measurement and control sensors; gas analysis and process monitoring sensors; and information technologies that capture data from those sensors to enable e-diagnostics and advanced process control. The power and reactive gas product group includes power and plasma generation products that are being integrated into higher performance solutions for manufacturing advanced semiconductor and thin-film products. The vacuum products group includes a complete range of vacuum technology products for the vacuum subsystems that are the foundation of many processing tools.