Euro EUV program touts power output milestone

December 9, 2005 – A European Commission-sponsored research project said it has achieved a significant breakthrough with development of a 800W EUV light source in a proof-of-principle experiment by project participant Xtreme Technologies GmbH, approaching the 1kW output seen as a requirement for EUV use in volume production by the end of the decade.

The three-year More Moore project, launched in 2004 and backed with GBP23.25 million in funding by the EC, seeks to resolve technical problems of EUV lithography in order to ready the technology for volume production in chipmaking processes. It is part of the Information Society Technologies initiative under the sixth Framework Program for Research and Technological Development. Xtreme Technologies is a joint venture between Lambda Physik AG and Jenoptik Laser Optik System GmbH.

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