September 13, 2006 – Specialty chemicals firm AZ Electronic Materials says it will invest over 50 million euros (US $63.4 million) over the next 15 months to increase production capacity.
The investments include 13 million euros (~$16.5 million) to expand manufacturing capacity for polysilazane (PHPS), a new dielectric for shallow trench insulation used in sub-80nm semiconductor manufacturing, marketed as a cheaper and more effective alternative to CVD technology.
As part of the PHPS expansion, AZ is adding a filling station in Shizuoka, Japan, expanding labs including a defect tool for quality control and a new reactor.