Dec. 15, 2008 – In a paper discussed at this week’s IEDM, researchers from IMEC reveal a monolithically integrated 11-megapixel 10cm²micromirror array, double the pixel density of comparable micromirrors, and a 10e12 cycle mechanical lifetime, also a record, they claim.

Each 8μm × 8μm array, fabricated using a 0.18μm/200mm SiGe-based MEMS process with 6 interconnect levels can be individually tilted by integrated CMOS circuitry beneath the array; poly-SiGe was used instead of Al to solve reliability issues and smooth integration with the CMOS chip below.

The device is part of IMEC’s CMORE initiative that is investigating system scaling not by shrinking CMOS but rather monolithic integration of heterogeneous technology. Potential uses include lithography mask writers and video projection systems. The CMORE technology can be migrated to 300mm based on customer demand, the group said in a statement.

Figure 1: Top view of individual mirrors and hinges. (Source: IMEC)

Figure 2: Cross-section of the integrated micro-mirror array, showing the
mirrors on top of the 6 layers of interconnect. (Source: IMEC)