On-Wafer Power Device Characterization

Cascade Microtech, Inc. announced a set of new probes and accessories for its Tesla on-wafer power device characterization system, making it fully compatible with the recently released Agilent B1505A power device analyzer. The combined solution offers an extended triaxial measurement range to accommodate low noise probing of power devices up to 2000 volts.

Emerging energy standards are driving demand for efficient power utilization, creating the need for accurate power device characterization in automotive, mobile devices, transportation, and power station manufacturing. There is a need to measure at increasing voltage and current levels when characterizing devices fabricated using new wide band gap materials such as silicon carbide (SiC) and gallium nitride (GaN). The Tesla system meets these demands by offering a ltage and current range for on-wafer measurements up to 2000V triax / 3000V coax, and 60A pulsed / 20A continuous. Combined with Agilent’s B1505A power device analyzer, the new Tesla probes have been designed to take full advantage of the performance of the B1505A, meeting the requirements of more advanced device characterization applications.

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