Alcatel Supplies Next-gen DRIE for STMicro

(September 5, 2007) ANNECY, France &#151 STMicroelectronics SAS (Tours, France), a division of STMicroelectronics NV Group, ordered the AMS 4200 DRIE production tool from Alcatel Micro Machining Systems. STMicro will use the tool for deeper advanced etching to realize 3D semiconductors and integrated MEMS packages.

(September 5, 2007) PFAFFENHOFEN, Germany &#151 UniTemp GmbH, in partnership with plasma-finish GmbH, developed a semiconductor processing and packaging system that combines plasma and thermal applications. The resulting plasma-temperature processing oven, Model PTP, features a compact chamber and fast ramp rates.

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