The customer selected the Falcon to replace existing tools. The systems have been delivered and were installed during the 4Q07.

The Elite 300 300mm wafer probe station for devices with process nodes at 45 nm and below incorporates state-of-the-art electrical and mechanical technology, advanced materials, and leading-edge measurement techniques. The station offers end-to-end productivity improvements through its advanced ergonomic design, measurement capability, and flexibility. Applications include RF/DC device characterization and modeling, wafer-level reliability, IC failure analysis, and design debug. The Elite 300 is reportedly the lowest-noise environment for ultra low-level noise measurements. The software automatically tracks wafer movement; an upward-looking camera system is included for advanced vertical probe cards. It offers a wide standard temperature range (–60°C to 300°C) plus a 400°C thermal chuck option. A hands-free microscope bridge mount system, smart cabling, accessory shelves, and ergonomic armrests all ensure faster setup and easier navigation to, and within, test die. A 300mm large-area microscope system, with video and software navigation, eases verification of large area and full-wafer needle contact. Cascade Microtech, Beaverton, OR; www.cascademicrotech.com.