Wet Processing System

Wet Processing System

CFM Technologies has developed a new version of its Full-Flow wet processing system. The Full-Flow 8100 system offers users the capability of doubling throughput by processing 100 200-mm wafers in a single chamber. A dual vessel 8100 expands throughput capacity by processing two wafer vessels simultaneously, using one core system. A more efficient use of water, chemicals and floor space are added features. The company says the Full-Flow 8100 system is also its platform for development of 300-mm wafer processing.

CFM Technologies, Inc., West Chester, PA

(610) 696-8300

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