TEL begins volume orders of immersion process coater/developer CLEAN TRACK(TM) LITHIUS(TM) i+

TOKYO–(BUSINESS WIRE)–July 6, 2005–Tokyo Electron Limited (TEL) announced today that they will start accepting volume orders for their immersion process coater/developer CLEAN TRACK LITHIUS i+ in January 2006.

TEL officially started accepting orders for the 300mm coater/developer CLEAN TRACK LITHIUS series in January 2004 and has installed more than 300 LITHIUS tools at customer sites worldwide. LITHIUS i+, the most advanced tool of the LITHIUS series, has the necessary 193nm immersion process capabilities required for mass producing sub-65 nm technology node devices.

TEL began sales of its immersion process coater/developer LITHIUS i for research and development purposes in July 2004. LITHIUS i+ has optimized functions based on knowledge obtained through numerous immersion process evaluations in collaboration with consortia, device makers, chemical/material producers and scanner suppliers.

The LITHIUS i+ incorporates rinse/dry modules to reduce defects and particles, protective coating (top coat) modules to prevent photoresist leaching, top coat removal process optimization, pattern collapse mitigation technology, and line edge roughness improvements. In addition to immersion capabilities, LITHIUS i+ maintains the same high performance and productivity capabilities of previous tools in the series.

By recognizing the importance of inline coater/developer and scanner evaluations, TEL will target further immersion process optimization and productivity enhancement on a LITHIUS i+ and Nikon NSR-S609B cluster in Japan, and on a LITHIUS i+ and ASML’s TWINSCAN XT:1400i cluster in the Netherlands.

TEL will begin accepting orders for LITHIUS i+ in January 2006, with an estimated 20 tools to be shipped in the first year.

About TEL

TEL, established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL has strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange. www.tel.com

Contacts

Tokyo Electron Limited
Harry Suzuki, 81-3-5561-7406
[email protected]
or
TEL U.S. Holdings
Michelle Pesez, 512-424-1757
[email protected]

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