May 13, 2002–Tualatin, OR–Semiconductor equipment-maker Novellus Systems opened its newest facility in Oregon. The 382,000-square-foot facility, dubbed the "Copper Campus" was designed to incorporate ISO Class 6 cleanroom space for system assembly, ISO Class 5 cleanroom space for system testing of Novellus’ deposition equipment, and an ISO Class 4 applications lab.

All of the company’s cleanrooms at this location, will be ballroom style.

Novellus will use the plant to manufacture and distribute the copper wire and insulating material used to manufacture semiconductors. With the opening of the Tualatin campus, the company announced it plans to close its other facility in Wilsonville, Oregon, according to the Knight Ridder Tribune.

"This new, state-of-the-art technology and manufacturing facility expands our long-standing business presence in the greater Portland area," said Jeff Benzing, Novellus’ executive vice president for the deposition business group.

Novellus is not the only company moving to Tualatin, its been reported that Menlo, CA-based Ultra Clean Technology leased a 15,000 square feet facility, in the same area. The company hopes to be up and running by September 10, 2002.