December 14, 2001 — CHELMSFORD, MA — Brooks Automation has acquired the Automation Systems Group of Zygo Corporation, which manufactures reticle automation systems including reticle sorters, reticle macro inspection systems, and reticle handling solutions for the semiconductor industry.

Brooks, a supplier of OEM tool automation and factory management software for the semiconductor, data storage and flat panel display manufacturing industries, spent about $11 million on the purchase.

Company officials say the acquisition aids Brooks’ goal of supplying an integrated suite of lithography automation systems.

“The cost of advanced photomask sets can now exceed $500,000, causing semiconductor manufacturers to turn increasingly toward automated reticle handling systems, such as Zygo’s ZAIS product to eliminate problems that may be caused by manual operations,” said Robert J. Therrien, president and CEO of Brooks. “This acquisition ill enable Brooks to provide a more complete solution for lithography automation, thus adding more value to our partnership with our customers.”

In related news, Brooks announced it has received a second request for information for the pending acquisition of Billerica, Mass.-based PRI Automation. The request was received from the Antitrust Division of the Department of Justice, which is responsible for antitrust review of the merger.