September 18, 2001 — CHELMSFORD, MA — Brooks Automation, Inc. recently announced that it has received a multi-million dollar order from ProMOS Technologies Inc. for its SEARAMS product and installation services. ProMOS will deploy SEARAMS in both its 200mm and 300mm factories.

Installation services will begin immediately. SEARAMS will enable ProMOS to connect and monitor status and performance of all key tools in the fab.

“One of the attributes of a world-class semiconductor manufacturer is the ability to completely and accurately assess the performance of each tool in the factory,” said Dr. Len Mei, vice president for manufacturing, ProMOS Technologies Inc. “This means that key state data from each tool must be automatically collected, analyzed and summarized in a manner that allows factory personnel to take quick and decisive action to correct inefficient operations. After a lengthy evaluation, we chose Brooks’ SEARAMS product for this purpose. SEARAMS promises to provide the best and most usable solution for ProMOS to meet its productivity goals.”

SEARAMS will provide ProMOS with the utilization of each tool over time. Utilization reports include graphical representations of both the productive and non-productive time with indications for the reasons for each period of non-productivity. Fab engineers can analyze the data and, based on their analysis, take specific actions to improve overall fab productivity. SEARAMS also provides the most complete implementation of ARAMS (Automated Reliability, Availability, and Maintainability Standards) E10, E58 and E79 as defined by SEMI.