Entegris unveils FOUP cleaning system

JAN. 20–CHASKA, Minn.–Entegris, Inc., a materials integrity management company, has announced that semiconductor manufacturers can now decrease the time, costs and contamination risks associated with cleaning front opening unified pods (FOUPs).

The Entegris automated Process One FX30 cleaning system is designed to greatly reduce FOUP contamination from human interaction and has robotic controls that transport FOUPs through the cleaning process. The robot and cleaning system sit inside an individual cleanroom environment to prevent contamination throughout the process. Aside from decreased contamination, the automated system helps semiconductor manufacturers reduce overall operating costs by offering higher throughput, higher reliability and lower utility consumption.

The automated Process One FX30 cleaning system is specifically designed to clean and dry Entegris’ FOUPs and Front Opening Shipping Boxes (FOSBs).

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