CHELMSFORD, MA, May 5, 2005 — Brooks Automation, Inc. announced it has been selected by Veeco Ion Beam Equipment, a business unit of Veeco Instruments Inc., to supply front-end automation systems for Veeco’s ion beam product line manufactured at its Plainview, NY factory. Veeco plans to standardize its ion beam products on a common tool architecture incorporating the Brooks Marathon Express family of vacuum
automation systems.

Michael Pippins, senior vice-president and chief marketing officer at Brooks Automation, said “This new design-in win at Veeco represents a significant accomplishment for Brooks as we position our company as the premier automation partner for the capital equipment industry. There is a clear benefit to companies like Veeco to outsource their automation systems as it allows them to focus on their core process technologies and reduce cost, while staying competitive in their non-core technologies by using commercially available best-in-class systems. As the largest provider of automation to the semiconductor and related industries, Brooks has the domain expertise, size and scale to handle the potential increase in business with Veeco. We are also pleased with this win because we believe the data storage market that Veeco Ion Beam serves is poised for strong growth and Veeco is one of the segment’s premier suppliers.”

“We are pleased to announce that we have selected Brooks as the outsourced automation supplier for our process integration platform,” said Robert P. Oates, vice president and general manager of Veeco’s Ion Beam Equipment group. “Brooks, already a component supplier of ours, was the logical choice because of their engineering and manufacturing capabilities. This outsourcing model will help us maximize our business unit’s growth and profitability during this period of strong capital equipment investment by our data storage customers.”